Electrical Engineering > LECTURE SLIDES/NOTES > University of Pennsylvania - ESE 529ESE529_Spring2020_lecture04_plates_largedeflections (All)

University of Pennsylvania - ESE 529ESE529_Spring2020_lecture04_plates_largedeflections

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ESE 529 Introduction to MEMS and NEMS Lecture 4 Troy Olsson Assistant Professor Department of Electrical and Systems Engineering rolsson@seas.upenn.edu2 Lecture Overview • Last time • Fol... ded and Crab-Leg Springs • Analysis of Complex Networks of Beams • Stress and Stress Gradient Effects in MEMS • Today • Plates • Beams and Plates Under Pressure Loads • Pressure Sensor Example • Large Deflections • Intro to Dynamic Response http://www.serendicdi.org/serendipedia/index.php?title=Effective_Mass Folded Beam Spring3 Folded-beam spring http://www.serendi-cdi.org/serendipedia/index.php?title=Effective_Mass Bending profile of a folded-spring Guided Clamped4 RF MEMS w/ folded springs Off On Christopher W. Dyck, Thomas A. Plut, Christopher D. Nordquist, Patrick S. Finnegan, Franklin Austin, Isak C. Reines, Chuck Goldsmith, "Fabrication and characterization of ohmic contacting RF MEMS switches," Proc. SPIE 5344, MEMS/MOEMS Components and Their Applications, (24 January 2004); doi: 10.1117/12.527984 ??? = 1 2?? ??????5 RF MEMS w/ folded springs [Show More]

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