Electrical Engineering > LECTURE SLIDES/NOTES > University of Pennsylvania - ESE 529ESE529_Spring2020_lecture06_dynamics_part2. (All)
University of Pennsylvania - ESE 529ESE529_Spring2020_lecture06_dynamics_part2.
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ESE 529 Introduction to MEMS and NEMS Lecture 6 Troy Olsson Assistant Professor Department of Electrical and Systems Engineering [email protected] Lecture Overview • Last Time • We ... learned the differential equations describing the dynamic response of MEMS devices • We learned the equivalence between the dynamic responses of mechanical and electrical harmonic oscillators • We learning how to model mechanical devices using equivalent circuit elements • We learned to solve for the sinusoidal steady state (or frequency) response of electromechanical devices • Today • Examine the frequency response • Define and discuss quality factor • Sources of damping in MEMS • Impact of Q factor on the performance of different devices • Laplace transforms for solving the transient response of MEMS devices3 Last time we solved for the sinusoidal steady-state velocity Velocity = Current ? ? = ? ?? + ?? + ?? = 1 ? ?? + ??? + ? ? ?∠? = ?∠? ? = 0 Let’s reference phase to the input [Show More]
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