Electrical Engineering > LECTURE SLIDES/NOTES > University of Pennsylvania - ESE 529ESE529_Spring2020_lecture10_piezoresistivesensing2. (All)

University of Pennsylvania - ESE 529ESE529_Spring2020_lecture10_piezoresistivesensing2.

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ESE 529 Introduction to MEMS and NEMS Lecture 10 Troy Olsson Assistant Professor Department of Electrical and Systems Engineering rolsson@seas.upenn.edu2 Lecture ‡ Last Time • We learned a... bout Piezoresistance in isotropic materials • We studied a piezoresistive accelerometer example ‡ Today ‡ We will learn about crystalline, anisotropic materials ‡ We will study the silicon crystal ‡ We will learn about Piezoresistance in single crystal materials3 Crystallinity Source: DaYid AUQRld ³FabUicaWiRQ TechQRlRg\´4 Crystallography [Show More]

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