Electrical Engineering > LECTURE SLIDES/NOTES > University of Pennsylvania - ESE 529ESE529_Spring2020_lecture09_piezoresistivesensing1 (All)
University of Pennsylvania - ESE 529ESE529_Spring2020_lecture09_piezoresistivesensing1
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ESE 529 Introduction to MEMS and NEMS Lecture 9 Troy Olsson Assistant Professor Department of Electrical and Systems Engineering rolsson@seas.upenn.edu2 Lecture Last Time • We finished o... ur study of the dynamic response of MEMS devices • We learned to solve for the stress and strain in bending beams Today We will study piezoresistive sensing, which will convert stress into a change in resistance that can be measured electrically This is the first of a series of MEMS transducers we will study3 Piezoresistive Strain Sensing [Show More]
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